• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The present invention relates to an optomechanical transducer comprising an optical fiber having a polished pointed distal end placed in front of a reflecting surface and a proximal end connected to a coupler combining a lighting optical fiber associated with a light source and a fiber optical measurement associated with a photo-detector. The reflecting element has a movable zone with an axial component, the axial distance between the distal end of the optical fiber and said reflecting surface at rest is determined so that the reflected light intensity I0 is equal to P.Imax where Imax designates the maximum reflected light intensity, and P is a parameter between 0.25 and 0.75.
    公开号:FR3026838A1
    申请号:FR1459383
    申请日:2014-10-01
    公开日:2016-04-08
    发明作者:Vivien Staehle-Bouliane；Jean-Michel Malavieille；Francois-Louis Malavieille
    申请人:Phonoptics；
    IPC主号:
    专利说明:

    [0001] FIELD OF THE INVENTION The present invention relates to the field of opto-mechanical transducers for detecting vibrations, continuous or periodic pressure variations and for capturing acoustic signals in the field. air or in a fluid, including in hostile environments. It relates more particularly to the field of transducers implementing the optical variation of the light transmitted by one or more optical fibers.
    [0002] State of the art A solution described in the European patent EP0082615 is known in the state of the art. This patent discloses a transducer for detecting acoustic signals or the like applied thereto. The transducer has two ridged pieces forming an optical network interacting with a fiber optic waveguide. Elastic means attached to the striated pieces provide a displacement perpendicular to the waveguide.
    [0003] Also known is the solution proposed by the European patent EP0027540 describing an optical transducer with an optical waveguide provided with two paths for the propagation of light which is deformed in response to variations in acoustic pressure or other parameters to be measured to modulate the amplitude of the light propagated along the two paths with opposite polarities. The light outputs of the two paths are picked up by photodetectors and applied to an electrical differentiation circuit. International patent application WO 1993007686 discloses an optical microphone which comprises a vibrating membrane defining a diaphragm for receiving acoustic signals. An optical element such as a lens is fixed to vibrate with the membrane in direct relation to the acoustic input signals. Fixed optical fibers are disposed in alignment with the lens to orient the initial light to the lens and to transmit light directed from the lens. Also known in the prior art optical sensor / microphone described in US patent US6462808. It comprises a light source coupled to a waveguide for transmitting a beam of light. One end of the waveguide has a peaked surface with an angle determined by Snell's law of refraction: sin alpha, / sin alpha2 = n1 / n2 where: - alpha, is the path angle of the light beam 15 through the waveguide media - alpha2 is the path angle of the light beam in the second media output of the peak area, - n1 and n2 are the light indices of the guide media. wave of light and the second medium. A reflective surface is disposed at an optimum distance from the peak area determined by the angle alpha2. The waveguide has on its outer surface at least one adjacent means for preventing light waves from being reflected onto the surface by back reflection in the waveguide. A light detector arranged to receive light reflected from the reflecting surface. Also known in the state of the art are metrology solutions, which are not transducers but equipment for distance measurement. International Application US6239865 discloses an example of a sensor and method for measuring the distance or / and physical properties of a material. This document discloses a distance to medium and / or physical property sensor, including a housing, at least one pair of optical fibers, each having an entrance end portion and a portion of exit end. The input end portion of the first optical fiber is connectable to a light source and the output end portion of the second optical fiber is connectable to light intensity measuring means. A sensor head including the input end portion of the second optical fiber is disposed near the output end portion of the first optical fiber.
    [0004] These two ends form between them a theta angle with respect to the axis, the light emerging from the exit end portion of the first optical fiber being reflected by a surface of a medium at a beta angle of incidence and in which angle beta = f (alpha, theta).
    [0005] Also known in the state of the art the patent FR2739445, the contents of which are incorporated in this patent by citation. This patent does not relate to a transducer, but contains an instruction on a physical measurement method by reflectometry, comprising an essential step of calibration. It describes a device forming an optical sensor comprising an optical fiber having a polished end along at least two inclined and intersecting planes forming a diopter in a roof or pyramid and another end coupled to a photo-emitter / photo-detector assembly, a means adapted to move in a controlled manner the polished end relative to a sample, as well as means for analyzing the return light, returning through the fiber. The intensity of this return light obeys an intensity response curve (I) calibrated as a function of the distance (Z) to the sample as well as its optical characteristics and has a maximum (A) at a fixed distance from the 'sample. The analysis means are arranged to determine one of the magnitudes of the group comprising the relative or absolute position of the sample and at least one of the optical characteristics thereof.
    [0006] The method that is the subject of this patent, the purpose of which is a distance measurement, comprises the following steps: a) providing an optical fiber having a polished end along at least two planes inclined with respect to the axis of this fiber and secants forming diopter roof or pyramid, the light from the fiber being thus divided into at least two convergent beams, b) subjecting said polished end of this fiber to a controlled relative displacement in the vicinity of a sample-target, c (f) measuring the intensity of the return light, returning through the fiber, after reflection on said sample, this measurement of the return light obeying a response curve of intensity (I) which is calibratable as a function of the distance (Z) to the sample as well as the optical characteristics of the sample, and which has a maximum (A) at a distance substantially fixed of the sample, and analyze this intensity as a function of said relative displacement, with a view to determining one of the magnitudes of the group comprising, on the one hand, the relative or absolute position of the sample, and on the other hand, at least one of the optical characteristics of the sample. Disadvantages of the Prior Art Solutions of the prior art relating to opto-mechanical transducers have several disadvantages. Some solutions require the use of several fibers, one for the incoming beam, the other for the outgoing beam. This greatly complicates use in hostile environments. Furthermore, the solutions of the prior art require a complex assembly on the optical plane as on the mechanical plane. These solutions lead to fragile transducers, difficult to adjust and unstable. -5- Finally, the solution proposed by the patent FR2739445, for distance measurement, implies a point of operation of the optical head very sensitive and leading to significant drift performance at the least mechanical variation, 5 particularly in case of maladjustment or modification of the positions under the effect of thermal expansion. The teaching of documents relating to metrology processes and equipment is adapted to static distance measurements. Solution Provided by the Invention In order to overcome these drawbacks, the invention relates in its most general sense to an opto-mechanical transducer comprising an optical fiber having a polished pointed distal end placed in front of a reflecting surface and a proximal end being connected to a coupler combining a lighting optical fiber associated with a light source and a measuring optical fiber associated with a photodetector, characterized in that said reflecting element has a movable zone with an axial component, the axial distance between the distal end of the optical fiber and said reflecting surface at rest is determined so that the reflected light intensity Io is equal to P1 where I0 denotes the maximum reflected light intensity, and P is a parameter between 0.25 and 0.75. The term "distal" is understood to mean the side of the fiber intended for the acquisition of the physical phenomena, and "proximal" the side where the processing electronics are located, as well as the optical coupler. Between the two ends extends the single optical fiber, which can have a great length, typically several hundred meters or even kilometers for applications such as marine hydrophone networks. Preferably, the distal end of the optical fiber has at least two intersecting polished facets forming diopter roof, pyramid or cone. According to a first variant, said movable zone is constituted by an elastically deformable membrane. According to a particular variant, said deformable membrane is attached peripherally to a rigid frame mechanically linked to the support of the distal end of the optical fiber. According to a particular embodiment, the end comprising the distal end of the optical fiber and said membrane are encapsulated in a casing having a vent in front of and behind the membrane for balancing the static pressures. According to another embodiment, said membrane has an elastic suspension. According to a second variant, said mobile zone is constituted by an elastic blade fixed at one end to a rigid frame mechanically linked to the support of the distal end 20 of the optical fiber. The natural frequency of the blade is between hertz and kilohertz. According to a particular embodiment, said elastic blade is fixed at one end to a rigid frame mechanically linked to the support of the distal end of the optical fiber, the natural frequency of the blade being greater than 5 hertz. According to another embodiment, said mobile zone is constituted by a flexible blade fixed at one end to a rigid frame mechanically linked to the support of the distal end of the optical fiber, the natural frequency of the blade being less than 5 hertz. According to another particular embodiment, the optical fiber comprises on the distal side a multiplexer providing the coupling of a plurality of optical fiber segments each having a pointed distal end positioned facing said reflective surface. According to another particular embodiment, the optical fiber comprises on the proximal side a multiplexer coupling a plurality of pairs of optical fibers each operating at a distinct wavelength band.
    [0007] The invention also relates to different applications of this inventive concept. It relates in particular to an opto-mechanical microphone, a pressure gauge or an opto-mechanical pressure sensor comprising an optical fiber having a polished pointed distal end placed in front of a reflecting surface and a proximal end being connected to a coupler combining an optical fiber. light source associated with a light source and a measurement optical fiber associated with a photo-detector, characterized in that said reflecting element is formed by a deformable membrane having a movable zone with an axial component, the axial distance between the end distal from the optical fiber and said reflective surface at rest is determined so that the reflected light intensity Io is equal to PI where I. denotes the maximum reflected light intensity, and P is a parameter between 0.25 and 0.75 . It also relates to an opto-mechanical sonar or a hydrophone comprising an optical fiber having a polished pointed distal end placed in front of a reflecting surface and a proximal end being connected to a coupler combining a lighting optical fiber associated with a light source. and an optical measurement fiber associated with a photodetector, characterized in that said reflecting element is formed by a deformable membrane having a movable zone with an axial component, the axial distance between the distal end of the optical fiber and said surface reflecting at rest is determined so that the reflected light intensity Io is equal to PI where I. denotes the maximum reflected light intensity, and P is a parameter between 0.25 and 0.75, said sonar having a duct -8 - Balancing the static pressure exerted on both sides of said membrane. It also relates to an opto-mechanical vibration sensor or an opto-mechanical biological sensor comprising an optical fiber having a polished pointed distal end placed in front of a reflecting surface and a proximal end being connected to a coupler combining an optical fiber. lighting associated with a light source and a measurement optical fiber associated with a photo-detector, characterized in that said reflecting element is formed by a deformable vibrating beam integral with a rigid support for fixing the distal end of said fiber optical, said vibrating beam having a movable zone with an axial component, the axial distance between the distal end of the optical fiber and said reflecting surface at rest is determined so that the reflected light intensity Io is equal to PI where I. designates the maximum reflected light intensity, and P is a parameter included ent re 0.25 and 0.75. Concerning the biological sensor, said beam is coated with a surface activator capable of interacting specifically with a biochemical component. It also relates to a drill head or a pitot probe comprising an opto-mechanical pressure sensor comprising an optical fiber having a polished pointed distal end placed in front of a reflecting surface and a proximal end connected to a coupler combining a fiber illumination optics associated with a light source and a measurement optical fiber associated with a photodetector, characterized in that said reflecting element is formed by a deformable membrane having a movable zone with an axial component, the axial distance between the distal end of the optical fiber and said reflecting surface at rest is determined so that the reflected light intensity Io is equal to PI where I. denotes the maximum reflected light intensity, and P is a parameter between 0.25 and 0, 75.35 -9- Detailed description of non-limiting examples of the invention The present invention will be they are understood on reading the description which follows, relating to non-limiting examples of embodiment, and with reference to the appended drawings in which: FIG. 1 represents a schematic view of a sensor according to the invention; FIG. schematic view of the distal end of the fiber - Fig. 3 shows the measurement diagram of the reflected intensity as a function of the distance between the distal end of the fiber and the reflective surface - Fig. 4 shows a schematic view FIG. 5 shows the measurement diagram of the reflected intensities of different wavelengths as a function of the distance between the distal end of the fiber and the reflecting surface for this variant embodiment. FIG. 6 represents a schematic view of a second variant embodiment; FIG. 7 represents the measurement diagram of the reflected intensity in accordance with FIG. the distance between the distal end of the fiber and the reflecting surface 25 for this second embodiment is different - FIG. 8 is a diagrammatic view of a third variant embodiment; FIG. 9 is a diagrammatic view of a fourth embodiment; variant embodiment Description of the general principle of a transducer according to the invention The invention relates in the first embodiment illustrated in FIGS. 1 to 3 to a transducer intended to measure the pressure variations exerted on a 10- membrane (1). Such a transducer can be used to pick up sounds, and thus form a microphone or a sonar or a hydrophone when the medium in which it is disposed is liquid. It can also constitute a pressure sensor for measuring very low pressures, or on the contrary large pressures, for example for the analysis of explosions. The transducer comprises an optical fiber (2), having a distal end (3) polished along at least two planes (faces) inclined with respect to the axis of this fiber and secants forming diopter roof or pyramid. The proximal end of the fiber (2) is connected to a "Y" fiber coupler (4) for mixing: - an input signal from a light source (5) via a first fiber section (6), and - an output signal transmitted to a photodetector (7) via a second fiber section (8). The single optical fiber (2) is used both as a transmitter (routing of light emitted by the light source (5)) and a receiver (collecting light reflected on the reflective membrane (1)), This significantly reduces manufacturing costs and space, while allowing measurement at a sample distance as large as the need requires. The fiber (2) transmits a beam (9) in a direction corresponding to the angle of refraction of the fiber, defined by the fiber core and the external environment indices. A portion (10) of the light (referred to as the return light) which is reflected on the reflecting surface of the membrane (1) penetrates the fiber (2) through the distal end (3). In the example described, the membrane (1) extends in a plane perpendicular to the axis of the distal end (3) of the optical fiber. The intensity of light returning to the fiber varies as a function of the distance between the distal end of the fiber and the surface of the membrane (1), with a response curve shown in FIG. the intensity I of the return light as a function of the fiber-membrane distance Z.
    [0008] The end (3) of the fiber is polished along at least two inclined planes (11, 12) respectively of an angle Alpha, and Alpha2 (preferably equal) with respect to the axis normal to the cross section of the fiber and secants shaped roof or pyramid. This end has a response curve substantially bell and therefore having a maximum. Such a curve is shown in FIG. 3, which shows the reflected relative intensity as a percentage (%) of the maximum intensity reflected as a function of the membrane-fiber distance Z in micrometer (one).
    [0009] The value of Z. depends essentially on the angle Alpha, while the value of I. depends on the type of the fiber and the optical characteristics of the surface of the sample (mainly its reflectivity at the wavelength of the light probe). The larger the angle Alpha, the larger Z is.
    [0010] Preferably, this angle Alpha should be selected in the range 50 degrees to 85 degrees. Moreover, the peak of the response curve is all the more important as the light beam emitted by the fiber is narrow, which depends on the numerical aperture of this fiber. Consequently, when a fiber is calibrated using a plurality of samples, it is possible to manufacture a table of data pairs relating to each sample, each pair comprising a data item. maximum intensity or I. and a maximum distance data or the rest distance between the distal end of the fiber (3) and the surface of the membrane (1) is determined so as to be positioned on the curve in the figure 3 by two points A and B, where A is positioned at the rising slope of the curve and B is positioned at the descending portion of the curve. These points A and B are placed where the change in the reflected light intensity is the most sensitive compared to the change in the position of the membrane. This position can be determined experimentally, by respective adjustments of the rest position of the membrane (1), or by calculation, or by pre-setting for a series production of a set of transducers of the same characteristics. The distance is determined so that the reflected light intensity I0 is equal to P.I. where I. denotes the maximum reflected light intensity, and P is a parameter between 0.25 and 0.75. The membrane (1) is suspended relative to a rigid frame (13) also holding and positioning the distal end (3) of the optical fiber. The suspension can be made in any known manner, for example by the periphery of an elastically deformable membrane, for example a metallized sheet. Depending on the intended application, a high stiffness will be sought, to allow the detection of acoustic high-frequency vibrations, or on the contrary of very low stiffness, to measure small variations in pressure. The fiber (2) comprises a core (14) of index n1 surrounded by a sheath (15) of index n2. The end is in the example described cut to form two intersecting planar surfaces. Of course, there may be three planes, four planes, or more, forming a pyramid, or a cone, or one may consider using two inclined planes at two different angles, or a conical shape. Moreover, the fiber can be of any type, for example monomode or multimode, index gradient or index jump. For example, a 100/140 multimode index-jump fiber will be chosen, comprising two inclined planes of the same angle θ of about 75 degrees with respect to its axis, which corresponds to a maximum distance fiber-sample of about 150 μm. Description of a first variant embodiment FIG. 4 represents a variant embodiment in which the light source comprises two distinct wavelengths, produced by a first source (51) in a wavelength lambda2 and a second source (52) emitting in a lambdal wavelength, these two light-transmitting sources via optical fibers coupled by a Y-coupler (53) to the main fiber (2). Similarly, the detection comprises a first photodetector (71) for measuring light in the lambda band, and a second photodetector for measuring light in the lambda2 band, receiving beams via a coupler ( 73). The main optical fiber (2) is connected to a Wavelength Division Multiplexing (WDM) multiplexer (60) which makes it possible to pass several signals of different wavelengths on a single optical fiber, by mixing them at the input to using a multiplexer (MUX), and separating them at the output by means of a demultiplexer (DEMUX). The distal end of the fiber (2) is equipped with a band rejection filter blocking and reflecting one of the Lambda2 wavelengths. The Lambda wavelength thus produces a response illustrated in FIG. 5 by the curve (21), whereas the curve (20), which is substantially constant, represents the response for the Lambda2 wavelength blocked by the filter ( 50). The curve (21) varies not only as a function of the distance between the distal end (3) and the membrane, but also as a function of the endogenous variations of the fiber (2) due, for example, to variations in temperature, curvature of the Fiber, aging of the fiber, etc. The endogenous variations of the fiber (2) are also presented in the curve (20). Consequently, the measurement of the luminous intensity difference in the two lambda and lambda2 wavelengths makes it possible to obtain an independent response of the external artifacts: the variations due not to the displacement of the membrane (1) but to variations in intensity in the main fiber (2) or upstream components are neutralized by subtraction of the signals measured by the two photo-detectors (71, 72). An alternative is to use a single wide-spectrum light source, and two different bandwidth filters to produce two beams of wavelengths lambda, and lambda2. DESCRIPTION OF A SECOND EMBODIMENT FIG. 6 represents a second variant embodiment in which the acquisition head comprises two (or more) measurement probes (31, 32) positioned facing one and the same membrane (1). . A coupler (33) at the distal end of the main fiber (2) transmits light to two optical fiber segments (34,35) whose tip is sharpened as previously described. There are two pointed sensors (31, 32) positioned opposite the reflective surface but offset in the axial direction of each other by a known distance h. This distance is the same as that between the two maximums of the reflected intensity of the two peak sensors shown in FIG. 7. When the membrane is at a distance such that there is a maximum of intensity, it is situated on any position but not maximum for the other point. When the signal goes from a maximum of intensity to another maximum of intensity, then the displacement made by the membrane in the axial direction is perfectly known, since it corresponds to the distance between the two points in the axial direction which is defined during the assembly of the optical fibers on the fixed support. This is why we can call the system "self-calibrating". In FIG. 7, the difference in the intensity "x" between the two maximum curves depends on various parameters such as the nature of the tip used with respect to the other tip, the attenuation of the signal which can differ between the two peaks. etc. This difference "x" can be zero or non-zero.
    [0011] Description of a Third Embodiment FIG. 8 shows an alternative embodiment in which the distal end of the optical fiber (83) and the membrane (81) are encapsulated in an envelope. The envelope is formed by a rigid frame (82), which is mechanically bonded to the support of the distal end of the optical fiber in one side, and on which the membrane is peripherally fixed in another side. The casing has a vent (84) which connects the internal cavity delimited by the casing with the external medium. The materials, in the gas or liquid states, can circulate freely through the vent in order to reach the equilibrium between the internal pressure cavity P1 and the pressure P2 of the external medium.
    [0012] Description of a fourth alternative embodiment Figure 9 shows an alternative embodiment where a reflecting element, for example, a mirror (91) is present on a vibrating plate (92). One end of the vibrating blade is mechanically bonded to the support (95) of the distal end of the optical fiber (93). The vibration frequency of the blade varies from hertz to kilohertz depending on the shape and material that make up this blade, for example, a metal elastic blade.
    [0013] Another possibility is to attach the optical fiber support to another support whose vibration is to be measured, for example, a motor. While the optical fiber support follows the movement of the motor, the moving area of the reflective element does not follow this movement because of the weak coupling by the end. The axial distance between the distal end of the optical fiber and said reflective surface changes as a function of the movement of the motor. By analyzing the reflected light intensity, the vibratory motion of the motor can be well illustrated.
    权利要求:
    Claims (7)
    [0001]
    CLAIMS1 - Opto-mechanical transducer comprising an optical fiber having a polished pointed distal end placed in front of a reflecting surface and a proximal end being connected to a coupler combining a lighting optical fiber associated with a light source and an optical fiber of measurement associated with a photodetector, characterized in that said reflecting element has a movable zone with an axial component (1), the axial distance between the distal end (3) of the optical fiber and said reflecting surface (1) at rest is determined so that the reflected light intensity Io is equal to PI where I. denotes the maximum reflected light intensity, and P is a parameter between 0.25 and 0.75.
    [0002]
    2 opto-mechanical transducer according to claim 1 characterized in that the distal end (3) of the optical fiber has at least two secant polished facets forming diopter roof, pyramid or cone.
    [0003]
    3 - opto-mechanical transducer according to claim 1 characterized in that said movable zone 25 is constituted by a membrane (1) elastically deformable.
    [0004]
    4 - opto-mechanical transducer according to claim 1 characterized in that said movable zone is constituted by a deformable membrane (1) fixed peripherally to a rigid frame mechanically linked to the support of the distal end of the optical fiber.
    [0005]
    5 - opto-mechanical transducer according to claim 3 or 4 characterized in that the end of the fiber comprising the distal end (3) of the optical fiber and said membrane (1) are encapsulated in an envelope having a vent for balancing static pressures.
    [0006]
    6 - opto-mechanical transducer according to claim 3 or 4 characterized in that said membrane (1) has an elastic suspension.
    [0007]
    7 - opto-mechanical transducer according to claim 1 characterized in that said movable zone is constituted by an elastic blade (1) fixed at one end to a rigid frame mechanically linked to the support of the distal end of the optical fiber, the own frequency of the blade being between hertz and kilohertz. 8 - opto-mechanical transducer according to claim 1 characterized in that said movable zone is constituted by a flexible blade fixed at one end to a rigid frame mechanically linked to the support of the distal end of the optical fiber, the natural frequency of the blade being less than 5 hertz. 9 - Opto-mechanical transducer according to claim 1, characterized in that the optical fiber comprises on the distal side a multiplexer ensuring the coupling of several segments of optical fibers each having a pointed distal end positioned opposite said reflective surface. 10 - Opto-mechanical transducer according to claim 1, characterized in that the optical fiber comprises on the proximal side a multiplexer coupling a plurality of pairs of optical fibers each operating at a wavelength band. separate. An opto-mechanical microphone comprising an opto-mechanical transducer according to claim 1. An opto-mechanical sonar comprising an opto-mechanical transducer according to claim 1, wherein said sonar having a balancing conduit of the static pressure exerted on both sides of said membrane. 13 - opto-mechanical pressure gauge comprising an opto-mechanical transducer according to claim 1. 14 - opto-mechanical vibration sensor comprising an opto-mechanical transducer according to claim 1, wherein said reflecting element is formed by a deformable vibrating beam integral with a rigid support for fixing the distal end of said optical fiber and for connection with an organ to be analyzed. 15 - Opto-mechanical biological sensor comprising an opto-mechanical transducer according to claim 1, wherein said reflecting element is formed by a deformable vibrating beam integral with a rigid support for fixing the distal end of said optical fiber, said beam being coated with a surface activator capable of interacting specifically with a biochemical component. A drill head comprising an opto-mechanical pressure sensor comprising an opto-mechanical transducer according to claim 1. A pitot probe comprising an opto-mechanical pressure sensor comprising an opto-mechanical transducer according to claim 1.
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    同族专利:
    公开号 | 公开日
    EP3201581A1|2017-08-09|
    EP3201581B1|2021-09-22|
    FR3026838B1|2016-11-25|
    US20170307437A1|2017-10-26|
    CA2963366A1|2016-04-07|
    WO2016051096A1|2016-04-07|
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    优先权:
    申请号 | 申请日 | 专利标题
    FR1459383A|FR3026838B1|2014-10-01|2014-10-01|OPTO-MECHANICAL TRANSDUCER FOR VIBRATION DETECTION|US15/516,356| US20170307437A1|2014-10-01|2014-10-01|Opto-mechanical transducer for the detection of vibrations|
    FR1459383A| FR3026838B1|2014-10-01|2014-10-01|OPTO-MECHANICAL TRANSDUCER FOR VIBRATION DETECTION|
    CA2963366A| CA2963366A1|2014-10-01|2015-10-01|Opto-mechanical transducer for the detection of vibrations|
    EP15784080.2A| EP3201581B1|2014-10-01|2015-10-01|Opto-mechanical transducer for the detection of vibrations|
    PCT/FR2015/052626| WO2016051096A1|2014-10-01|2015-10-01|Opto-mechanical transducer for the detection of vibrations|
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